Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Standard [CURRENT]

DIN 50451-4:2024-09

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)
Publication date
2024-09
Original language
German
Pages
15

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Publication date
2024-09
Original language
German
Pages
15
DOI
https://dx.doi.org/10.31030/3550942

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Overview

This document specifies a test method for determining the mass fractions of 34 elements in the extreme trace range in ultrapure water, using inductively coupled plasma mass spectrometry (ICP-MS) as the determination method. The method applies to elemental trace mass fractions from 10 ng/kg to 1 000 ng/kg. This document has been prepared by Working Committee NA 062-02-21 AA "Prüfung von Prozesschemikalien für die Halbleitertechnologie" ("Testing of process materials for semiconductor technology") at DIN Standards Committee Materials Testing (NMP).

Content

ICS

29.045

DOI

https://dx.doi.org/10.31030/3550942
Replacement amendments

This document replaces DIN 50451-4:2007-02 .

Cooperation at DIN

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