DIN 51418-1:2025-05

This document specifies general vocabulary for the X‑ray fluorescence analysis of solid and liquid materials. This document does not contain terms relating to the planning of analyses, sample preparation, calibration/evaluation, or consideration of measurement uncertainties. These are dealt with separately in DIN 51418-2. X‑ray fluorescence analysis is an analytical method for the identification and quantification of chemical elements contained in a substance, and for the determination of layer thicknesses. For this purpose, the substance is excited to emit element specific radiation whose spectral composition contains this information. The purpose of this document is to harmonize the use of technical terms for the X‑ray fluorescence analysis and to achieve their best possible agreement with different fields of optical atomic spectral analysis, namely optical emission spectrometry (OES), atomic absorption spectrometry (AAS) and atomic fluorescence spectrometry (AFS). This document has been prepared by Working Committee NA 062-08-15 AA "Grundlagen der analytischen Atomspektroskopie" ("Basic principles of analytical atomic spectroscopy") at DIN Standards Committee Materials Testing (NMP).