Standard [WITHDRAWN]
DIN ISO 15632:2015-11
Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis (ISO 15632:2012)
- German title
- Mikrobereichsanalyse - Ausgewählte instrumentelle Performanceparameter zur Spezifizierung und Überprüfung engergiedispersiver Röntgenspektrometer für die Anwendung in der Elektronenstrahl-Mikrobereichsanalyse (ISO 15632:2012)
- Publication date
- 2015-11
- Original language
- German
- Pages
- 17
- Publication date
- 2015-11
- Original language
- German
- Pages
- 17
- DOI
- https://dx.doi.org/10.31030/2350146
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Overview
This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309 and ASTM E15108. The responsible German committee for this standard is Working Committee NA 062-08-18 AA "Elektronenmikroskopie und Mikrobereichsanalyse" ("Electron microscopy and microbeam analysis") at DIN Standards Committee Materials Testing (NMP).
Content
ICS
DOI
This document has been replaced by: DIN ISO 15632:2022-09 .