Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

Standard [CURRENT]

SN EN ISO 23216:2022-11

Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

German title
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)
Publication date
2022-11
Original language
English
Pages
18

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Publication date
2022-11
Original language
English
Pages
18

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