Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)

Standard [CURRENT]

UNE-EN 62047-12:2012-02-01

Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)

Publication date
2012-02-01
Original language
English
Pages
29

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Publication date
2012-02-01
Original language
English
Pages
29
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