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Cleanroom technology - Measurement of condensable airborne substances

Technical rule [PRE-ORDER]

VDI 2083 Blatt 22:2026-05

Cleanroom technology - Measurement of condensable airborne substances

German title
Reinraumtechnik - Messung kondensierbarer luftgetragener Substanzen
Publication date
2026-05
Original language
German, English
Pages
20

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Publication date
2026-05
Original language
German, English
Pages
20

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Short description

This standard describes a method for sampling and measuring condensed chemical contamination on surfaces. The results provide starting points for process and product protection. Surface contamination can have detrimental effects on the products of many manufacturing industries. This standard does not cover contamination of liquid process media. Its scope covers all production and storage areas where products and processes can be affected by chemical surface cleanliness. This standard covers organic molecules including silanes and siloxanes.

Content

ICS

13.040.35
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