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Draft standard

DIN 50451-4:2024-01 - Draft

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)
Date of issue
2023-11-24
Publication date
2024-01
Original language
German
Pages
15

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Date of issue
2023-11-24
Publication date
2024-01
Original language
German
Pages
15
DOI
https://dx.doi.org/10.31030/3502192

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Content
ICS
29.045
DOI
https://dx.doi.org/10.31030/3502192

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