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Draft standard [WITHDRAWN]

DIN EN 62047-1:2014-05 - Draft

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)

German title
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 1: Begriffe (IEC 47F/177/CD:2013)
Date of issue
2014-04-25
Publication date
2014-05
Original language
German, English
Pages
59

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Date of issue
2014-04-25
Publication date
2014-05
Original language
German, English
Pages
59

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Replacement amendments

This document has been replaced by: DIN EN 62047-1:2016-12 .

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