Testing of semiconductor materials; determination of the radial resistivity variation of silicon or germanium slices by means of the four-probe/direct current method
German title
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung der radialen Variation des spezifischen elektrischen Widerstandes an Silicium- oder Germanium-Scheiben mit dem Vier-Sonden-Gleichstromverfahren
Publication date
1988-05
Original language
German
Pages
3
Publication date
1988-05
Original language
German
Pages
3
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