Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO/FDIS 14644-15:2025); German and English version prEN ISO 14644-15:2025
German title
Reinräume und zugehörige Reinraumbereiche - Teil 15: Bewertung der Reinraumtauglichkeit von Ausrüstungsgegenständen und Materialien anhand der chemischen Luft- und Oberflächenkonzentration (ISO/FDIS 14644-15:2025); Deutsche und Englische Fassung prEN ISO 14644-15:2025
Date of issue
2025-12-05
Publication date
2026-01
Original language
German,
English
Pages
55
Date of issue
2025-12-05
Publication date
2026-01
Original language
German,
English
Pages
55
DOI
https://dx.doi.org/10.31030/3663295
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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/3663295
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