Surface chemical analysis - Scanning Probe Microscopy- Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

Draft standard [WITHDRAWN]

ISO/DIS 13083:2013-03 - Draft

Surface chemical analysis - Scanning Probe Microscopy- Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

German title
Chemische Oberflächenanalyse - Rastersondenmikroskopie - Standards zur Definition und Kalibrierung der räumlichen Auflösung von Rasterausbreitungswiderstandsmikroskopie und Rasterkapazitätsmikroskopie
Publication date
2013-03
Original language
English
Pages
18

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Publication date
2013-03
Original language
English
Pages
18

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Replacement amendments

This document has been replaced by: ISO 13083:2015-08 .

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