Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors

Draft standard

ISO/DIS 19383:2025-05 - Draft

Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors

German title
Atomlagenabscheidung - Chemische Eigenschaften von Vorläufersubstanzen für die Atomlagenabscheidung und damit zusammenhängende Verfahrensspezifikationen
Publication date
2025-05
Original language
English
Pages
13

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Publication date
2025-05
Original language
English
Pages
13

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