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Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram

Standard [CURRENT]

DIN 50451-5:2022-08

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 5: Leitlinie zur Auswahl von Werkstoffen und Prüfung ihrer Eignung für Geräte zur Probenahme und Probenvorbereitung für die Elementspuren-Bestimmung im Bereich von Mikrogramm je Kilogramm und Nanogramm je Kilogramm
Publication date
2022-08
Original language
German
Pages
11

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Publication date
2022-08
Original language
German
Pages
11
DOI
https://dx.doi.org/10.31030/3369971

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Content

ICS

29.045

DOI

https://dx.doi.org/10.31030/3369971
Replacement amendments

This document replaces DIN 50451-5:2010-03 .

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