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Standard [CURRENT]

DIN 50451-6:2014-11

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH₄F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 6: Bestimmung von 36 Elementen in hochreiner Ammoniumfluorid-Lösung (NH₄F) und Ätzmischungen aus hochreiner Ammoniumfluorid-Lösung mit Flusssäure
Publication date
2014-11
Original language
German
Pages
14

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Publication date
2014-11
Original language
German
Pages
14
DOI
https://dx.doi.org/10.31030/2238588

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Content
ICS
29.045
DOI
https://dx.doi.org/10.31030/2238588

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