DIN EN ISO 25178-603:2014-02

This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes. This part of ISO 25178 is a Geometrical Product Specification standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link 5 of the chain of standards on areal surface texture. The ISO/GPS Masterplan given in ISO /TR 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document and the default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless otherwise indicated. This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213 "Dimensional and geometrical product specifications and verification" (secretariat: DS, Denmark) in collaboration with Technical Committee CEN/TC 290 "Dimensional and geometrical product specification and verification", the secretariat of which is held by AFNOR (France). The responsible national committee is Working Committee NA 152-03-03 AA "Oberflächen" ("Surfaces") at the Standards Committee Technical Fundamentals (NATG) at DIN.