DIN EN ISO 25178-604:2013-12

This part of ISO 25178 is a geometrical product specification (GPS) standard and is to be regarded as a general GPS standard (see ISO/TR 14638). It influences the chain link of the measurement equipment in the chains of standards on surface texture profile and areal surface texture. The ISO/GPS Masterplan given in ISO 14638 gives an overview of the ISO/GPS system of which this document is a part. The fundamental rules of ISO/GPS given in ISO 8015 apply to this document. The default decision rules given in ISO 14253-1 apply to specifications made in accordance with this document, unless otherwise indicated. This part of ISO 25178 describes the metrological characteristics of coherence scanning interferometric microscopes, designed for the measurement of surface topography maps. This document (EN ISO 25178-604:2013) has been prepared by Technical Committee ISO/TC 213 "Dimensional and geometrical product specifications and verification" (secretariat: DS, Denmark), with the participation of German experts, in collaboration with Technical Committee CEN/TC 290 "Dimensional and geometrical product specification and verification", the secretariat of which is held by AFNOR (France). On the national level the responsible committee is NA 152-03-03 AA "Oberflächen" ("Surfaces") at the Fundamental Technical Standards Committee (NATG) at DIN.