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IEC 62047-4:2008-08

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS

German title
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Mikrosystemtechnik
Publication date
2008-08
Original language
English, French
Pages
38
Publication date
2008-08
Original language
English, French
Pages
38

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