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Standard [CURRENT]

ISO 15632:2021-02

Microbeam analysis - Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

German title
Mikrobereichsanalyse - Ausgewählte instrumentelle Performanceparameter zur Spezifizierung und Überprüfung engergiedispersiver Röntgenspektrometer (EDS) für die Anwendung mit einem Rasterelektronenmikroskop (REM) oder einem Elektronenstrahlmikroanalysator (ESMA)
Publication date
2021-02
Original language
English
Pages
13

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Publication date
2021-02
Original language
English
Pages
13

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Content
ICS
71.040.99
Replacement amendments

This document replaces ISO 15632:2012-08 .

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