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Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Standard [CURRENT]

ISO 22278:2020-08

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

German title
Hochleistungskeramik - Prüfmethode für die kristalline Qualität von Siliciumcarbid (SiC) -Einkristallen unter Verwendung von hochauflösender Röntgenbeugung XRD
Publication date
2020-08
Original language
English
Pages
29

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Publication date
2020-08
Original language
English
Pages
29

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Content

ICS

81.060.30

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