Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Standard [CURRENT]

JIS B 9920-2:2019-03-20

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Publication date
2019-03-20
Original language
English

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Publication date
2019-03-20
Original language
English
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