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Technical rule [CURRENT]

ISO/TR 19319:2013-03

Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

German title
Chemische Oberflächenanalyse - Grundlegende Ansätze zur Bestimmung der lateralen Auflösung und Schärfe von strahlenbasierten Verfahren
Publication date
2013-03
Original language
English
Pages
116

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Publication date
2013-03
Original language
English
Pages
116

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Content
ICS
71.040.50
Replacement amendments

This document replaces ISO/TR 19319:2003-12 .

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