Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 9: Determination of 40 elements in hydrogen peroxide by ICP-MS

Draft standard [PRE-ORDER]

DIN 50451-9:2026-11 - Draft

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 9: Determination of 40 elements in hydrogen peroxide by ICP-MS

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 9: Bestimmung von 40 Elementen in Wasserstoffperoxid mittels ICP-MS
Date of issue
2026-09-25
Publication date
2026-11
Accessibility
Original language
German
Pages
19

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Date of issue
2026-09-25
Publication date
2026-11
Original language
German
Pages
19
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Content

ICS

29.045

Cooperation at DIN

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