Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO/FDIS 14644-13:2025); German and English version prEN ISO 14644-13:2025
German title
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienkonzentration (ISO/FDIS 14644-13:2025); Deutsche und Englische Fassung prEN ISO 14644-13:2025
Date of issue
2025-11-21
Publication date
2025-12
Original language
German,
English
Pages
82
Date of issue
2025-11-21
Publication date
2025-12
Original language
German,
English
Pages
82
DOI
https://dx.doi.org/10.31030/3659563
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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/3659563
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