Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO 14644-13:2026); German version EN ISO 14644-13:2026

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DIN EN ISO 14644-13:2026-08

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO 14644-13:2026); German version EN ISO 14644-13:2026

German title
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienkonzentration (ISO 14644-13:2026); Deutsche Fassung EN ISO 14644-13:2026
Publication date
2026-08
Original language
German
Pages
45

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Publication date
2026-08
Original language
German
Pages
45
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Content

ICS

13.040.35
Replacement amendments

This document replaces DIN EN ISO 14644-13:2017-11 .

Cooperation at DIN

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