DIN EN ISO 14644-13:2017-11

This standard gives guidance on the selection of cleaning methods to achieve specified cleanliness levels. For the selection procedure, the aspects of surface description, cleanliness specifications, types of contamination, cleaning techniques, material compatibility, and assessment methodology are taken into consideration. Most of the methods are suitable for removal of more than one contamination category at the same time; therefore, a common standard for the selection of a cleaning method for both particles, as well as chemical contamination, is needed. The standard covers the cleaning of cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom to a specified degree. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.