Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO/FDIS 14644-14:2025); German and English version prEN ISO 14644-14:2025
German title
Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft (ISO/FDIS 14644-14:2025); Deutsche und Englische Fassung prEN ISO 14644-14:2025
Date of issue
2025-11-21
Publication date
2025-12
Original language
German,
English
Pages
54
Date of issue
2025-11-21
Publication date
2025-12
Original language
German,
English
Pages
54
DOI
https://dx.doi.org/10.31030/3660801
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Content
ICS
13.040.35
DOI
https://dx.doi.org/10.31030/3660801
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