Surface chemical analysis - Scanning probe microscopy - Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements
German title
Chemische Oberflächenanalyse - Rastersondenmikroskopie - Leitfaden für das Verfahren und die Vorgehensweise zur Bestimmung der Temperatureffekte auf AFM-Dimensionalmessungen
Publication date
2025-02
Original language
English
Pages
13
Publication date
2025-02
Original language
English
Pages
13
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