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Draft standard [WITHDRAWN]

DIN IEC 62659:2013-09 - Draft

Nanomanufacturing - Large scale manufacturing for nanoelectronics (IEC 113/171/CD:2012)

German title
Nanofertigung - Großtechnische Produktion von Nanoelektronik (IEC 113/171/CD:2012)
Date of issue
2013-08-30
Publication date
2013-09
Original language
German, English
Pages
21

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Date of issue
2013-08-30
Publication date
2013-09
Original language
German, English
Pages
21
DOI
https://dx.doi.org/10.31030/2058430

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ICS
07.120
DOI
https://dx.doi.org/10.31030/2058430
Replacement amendments

This document has been replaced by: DIN IEC/IEEE 62659:2019-09 .

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