Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometers to micrometers (ISO 18516:2019); Text in English
German title
Chemische Oberflächenanalyse - Augerelektronen-Spektroskopie und Röntgenphotoelektronen-Spektroskopie - Bestimmung der lateralen Auflösung (ISO 18516:2019); Text Englisch
Date of issue
2019-11-29
Publication date
2020-01
Original language
English
Pages
63
Date of issue
2019-11-29
Publication date
2020-01
Original language
English
Pages
63
DOI
https://dx.doi.org/10.31030/3107564
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