Optical measurement of microtopography - Calibration of interference microscopes for form measurement
German title
Optische Messtechnik an Mikrotopographien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung
Publication date
2018-03
Original language
German
Pages
31
Publication date
2018-03
Original language
German
Pages
31
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Short description
This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.